Process Modeling Tools

AnisE - Anisotropic Etch Simulation

IntelliEtch - Atomistic Etch Simulation tool

IntelliFab - Process Visualisation

MEMaterial - Database and Optimisation

RECIPE 3D - RIE/ICP Bosh Simulation tool

 

Design Tools

BluePrint - Layout Editor

Tape Out - Design Rule Check (DRC)

3D Builder - Hex Mesher

Hexpresso - Hex mesher

Multiphysics Modules

ThermoElectroMechanical

ElectroMagnetic and RF MEMS

PiezoMEMS

MicroFluidics & BioMEMS

MEMS Packaging Module

 

System Modeling

SYNPLE - Multi Domain Simulation

MEMSynth - Synthesis

System Model Extraction

EDA Linker